How much you earn depends on the location of the ATM (is it well-advertised and visible?), how much it’s needed (are you a cash-only venue? do you provide cash back on debit / credit card purchases?) and how much foot traffic you get. The more foot traffic, the better.
The general rule of thumb says 3-5% of people who see the ATM will use it. If you average 200 customers a day, you would expect 8 people to use the ATM daily. You could then take those 8 people, multiply it by the surcharge amount, and multiply that figure by the number of days you are open for business every year. That would give you an estimate of annual revenue.